Host: The Japan Society for Precision Engineering
Name : 2023 JSPE Spring Conference
Location : [in Japanese]
Date : March 14, 2023 - March 16, 2023
Pages 445-446
We develop a highly stable alignment monitor which can work in a severe environment of high magnetic field and vacuum by adopting a length measurement grid of optical fiber introduced absolute distance interferometers. At that system, interference signals and consequently free spectral range, FSR of its reference etalon and distances measured by the interferometer are affected by deformations of the optical fibers. Here, we improve uncertainties in their evaluations and measured distances by adopting a polarization maintain optics.