Proceedings of JSPE Semestrial Meeting
2023 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2023 JSPE Spring Conference

Location : [in Japanese]

Date : March 14, 2023 - March 16, 2023

Active vibration suppression of precision positioning stage with unknown characteristics using excitation force
*Iku Kurose, Kaiji Sato, Mizuki Takeda
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Keywords: Vibration suppression, Residual vibration, Ultra-precision positioning
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 706-707

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Abstract
[in Japanese]
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© 2023 The Japan Society for Precision Engineering
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