Proceedings of JSPE Semestrial Meeting
2023 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2023 JSPE Spring Conference

Location : [in Japanese]

Date : March 14, 2023 - March 16, 2023

Visualization of Preston’s coefficient distribution in CMP
*Yohei Hashimoto, Takumi Sato, Norikazu Suzuki, Hozumi Yasuda, Satoru Yamaki, Yoshihiro Mochizuki
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Keywords: CMP, Preston’s coefficient, Preston’s law, Material removal rate distribution
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 790-791

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[in Japanese]
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© 2023 The Japan Society for Precision Engineering
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