Measurement Accuracy of Tool Edge Position in Evanescent Light Fields on Soft Matter Surfaces

Abstract

Methods for measuring approach distances of the microtool edge in evanescent light field on solid material surfaces such as glass and SiC has been established. However, it is necessary to bring the tool edge to several hundred nm from the surface, so tool edges and substrates may be broken because of touching. Accordingly, in order to examine the practicality of evanescent light on soft matter surfaces, we report on evaluating the measurement accuracy of the distance between the silicone surface and the tool edge height-controlled by piezoelectric element in this article.