Journal of Quality Engineering Society
Online ISSN : 2189-9320
Print ISSN : 2189-633X
ISSN-L : 2189-633X
Optimization of Parameters of Liquid-Phase Deposition for Oxide Thin Films
Takayuki ToyoshimaShigeru Yanagase
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2002 Volume 10 Issue 2 Pages 110-115

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Abstract

Optimization of the Inorganic Film Forming Condition Using the Liquid-Phase Deposition Method In the liquid-phase deposition process, inorganic film is formed on the glass flake. Parameter design was conducted to optimize the film forming condition using a beaker scale experiment before the construction of the production equipment. In the experiment, the time of film formation was considered the signal factor, the thickness of formed oxide film as the output, and flake concentration as the noise factor. Since the measurement of film thickness on the minute flakes was very difficult, the film tone was converted into thicness by providing a conversion line. After the parameter design, a gain of 9.12 db was confirmed. From the result, it was possible to design and construct the production equipment with the minimum cost. Since the large scale experiment was minimized, research cycle time was greatly reduced.

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© 2002 Robust Quality Engineering Society
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