1994 Volume 12 Issue 4 Pages 477-484
Micro-discharge phenomena is experimentally investigated in vacuum environment. The experimental setup based on a STM (Scanning Tunneling Microscope), which is consisted of electric circuit for micro-discharge and nanometer controlled actuators for adjusting gap length, was constructed. In order to carry out the in-situ observation of micro-discharge phenomena it was installed in a SEM (Scanning Electron Microscope) chamber fitted with a photomultiplier. Applying several hundereds voltages to the gap between the electrode and the specimen at a distance of several hundreds nanometers, the electrical breakdown followed by micro-discharge occurs. Light emission was simultaneously detected with photomultiplier. It was found that the micro-discharge voltage falls with increasing current.
