Abstract
In semiconductor manufacturing, feedback adjustment and its control are essential, and action must be taken to delete the cause of variability. Therefore, combining SPC and APC is needed to control semiconductor manufacturing. In this paper, we propose how to implement effective SPC combined with APC in semiconductor manufacturing ; in addition, we build the useful model for the implementation of SPC. It can represent the relationship between the causes and effects in semiconductor manufacturing. The proposed model is verified by analyzing real data.
