Abstract

Corrosion of Al-pattern on IC appears earlier than abnormarities in its input-and-output characteristics. Therefore, it is reasonable to check the corrosion in order to catch the tendency of degradation of electronic equipments as early as possible. Then we did a fundamental study to adopt the amount of the corrosion as a diagnotic parameter. As the result, we found the time-dependence of corrosion and a relationship between corrosion and failure. These characteristics can be applied to degradation diagnosis.