Abstract
The ESD testing method of the semiconductor device is classified broadly into Human Body Model (Machine Model as alternative test) and Charged Device Model. Regarding Charged Device Model, the discharge method using a mercury relay is standardized in Japan as JEITA standard. On the other hand, the aerial discharge method using a discharge plate is standardized in U.S. as JEDEC standard. Generally, charging voltage represents the ESD mununity for the Charged Device Model. In this paper, we clarified that ESD failure was strongly depended on the peak current (Ip) value of discharge waveform, not discharge method or charging voltage. And we indicated the future direction of standardization by applying this result.
