The Journal of Reliability Engineering Association of Japan
Online ISSN : 2424-2543
Print ISSN : 0919-2697
ISSN-L : 0919-2697
Mechanical Reliability in MEMS(Reliability of MEMS)
Toshiyuki TSUCHIYA
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2005 Volume 27 Issue 2 Pages 105-112

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[in Japanese]
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© 2005 Reliability Engineering Association of Japan
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