The Journal of Reliability Engineering Association of Japan
Online ISSN : 2424-2543
Print ISSN : 0919-2697
ISSN-L : 0919-2697
Reliability Evaluation of Thin Gate Dielectric using Conductive Atomic Force Microscopy(Failure Analysis Technique and Tools in the Nanotechnology Era)
Akiyoshi SEKO, Mitsuo SAKASHITA, Akira SAKAI, Shigeaki ZAIMA
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2006 Volume 28 Issue 3 Pages 163-174

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[in Japanese]
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© 2006 Reliability Engineering Association of Japan
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