The Journal of Reliability Engineering Association of Japan
Online ISSN : 2424-2543
Print ISSN : 0919-2697
ISSN-L : 0919-2697
Reliability of High-κ Gate Dielectrics(Advanced LSI Technology and its Reliability)
Noboru SHIONO
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2007 Volume 29 Issue 4 Pages 198-205

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[in Japanese]
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© 2007 Reliability Engineering Association of Japan
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