MEMS: From Development to Production

Abstract

Micro Electro Mechanical Systems (MEMS) are in the phase of transition from research to industry. This paper intends to describe this process from the point of view of a European R&D institution. The R&D activities at HSG-IMIT in Germany are described. The last chapter outlines the cooperation between the R&D institution and industry, in particular with local German small and medium sized enterprises.