SEISAN KENKYU
Online ISSN : 1881-2058
Print ISSN : 0037-105X
ISSN-L : 0037-105X
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Rotational feedthrough using ultrasonic vibration transducer for ultra-high vacuum condition
Takeshi MORITA, Toshiki NIINO
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2000 Volume 52 Issue 9 Pages 422-425

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© 2000 Institute of Industrial Science The University of Tokyo
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