SEISAN KENKYU
Online ISSN : 1881-2058
Print ISSN : 0037-105X
ISSN-L : 0037-105X
Research Flash
Fabrication and Characterization of Acoustic Frequency Analysis Sensors made of SOI Wafers
Kouichi YAMASHITA, Hiroyuki FUJITA, Hiroshi TOSHIYOSHI
Author information
JOURNAL FREE ACCESS

2001 Volume 53 Issue 2 Pages 143-146

Details
Download PDF (797K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© 2001 Institute of Industrial Science The University of Tokyo
Previous article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top