SEISAN KENKYU
Online ISSN : 1881-2058
Print ISSN : 0037-105X
ISSN-L : 0037-105X
Research Flash
SAM meets MEMS: for micro/nano patterning
Janggil KIMKenzo KARASAKINobuyuki TAKAMAJuergen BRUGGERBeomjoon KIM
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2003 Volume 55 Issue 6 Pages 483-488

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© 2003 Institute of Industrial Science The University of Tokyo
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