Abstract
When single-crystal surfaces are prepared by cutting a single-crystal rod with a diamond wire-saw,the cut surfaces are severely damaged. A chemical-etching recipe to remove such defects, on Ag single-crystal surfaces, is developed. The etching effect was evaluated by X-ray diffraction. It turned out that the defects created on the cut surface can be removed by etching for 10 minutes at an etching rate of 8 µm/min under the irradiation of the 45kHz supersonic wave in the solution of 67wt%HNO3 diluted with pure water at the volume ratio 1:1.