Fabrication of EHD Pump using MID technology

Abstract

MID(Molded Interconnect Device） is injection molded product with metal film formed on the surface. It has Electrical and Mechanical function. Aiming at apply MID to mechatronic devices such actuators and sensors, the authors research the development of MID with EHD(Electro Hydro Dynamics） pump function using MID technology. EHD pump is an application of a functional fluid flowing when electric field is applied. It does not require a mechanical driving part and can be used as a small pump. The authors developed the EHD pump that has dual helix electrodes on internal surface of flow path. The pump at a voltage of 1.4kV caused a flow of EHD fluid at a flow rate of 6.5cm³/min.