Fixed abrasive tool with smoothed abrasive layer for mirror polishing of rough surface glass in a single process

Abstract

The authors propose a new fixed abrasive tool with a deformable abrasive layer for mirror-polishing of rough surface glass in a single process. During the polishing, the deformation of the binder in the abrasive layer smoothes the protrusion of abrasive grains. The layer include diamond grains of ϕ4-6μm for truncating the pearskin surface of the glass, and ceria grains of ϕ2μm for promoting a chemical reaction to improve the surface roughness. Through polishing experiments, it was confirmed that our new tool achieved a finished surface with a surface roughness Ra of 4nm in a single process.