Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
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Fabrication of Nano-structures of Silicon and Diamond Using Plasma Processing
Akimitsu HATTA, Hiroaki KANAKUSA, Hiroaki YOSHIMURA, Chaoyang LI, Hiroyuki FUJIMORI
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Keywords: Silicon, Diamond, Plasma, Etching, Sputtering
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2005 Volume 56 Issue 12 Pages 827

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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