Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Letters
Nano Scale Mechanical Property Evaluation of DLC Film Deposited by PBII Method
Tsuyoshi HASHIZUME, Shojiro MIYAKE, Shuichi WATANABE, Takashi NAKAMARU
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Keywords: Atomic Force Microscope (AFM), Diamond-Like Carbon (DLC), Plasma Based Ion Implantation (PBII), Plasma Source Ion Implantation (PSII)
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2005 Volume 56 Issue 12 Pages 951

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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