Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Research Papers
Fabrication of Micro-Circuit Board by Aluminum Anodizing and Laser Irradiation
−Effect of Laser Irradiation Condition on Micro-Pattern Formation−
Tatsuya KIKUCHIHideaki TAKAHASHI
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2005 Volume 56 Issue 9 Pages 528

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Abstract

A prototype circuit board with micro-metal patterns was fabricated by laser irradiation and an electrochemical technique. An aluminum specimen covered with porous type oxide films was irradiated with a pulsed laser beam, using a convex lens with a focal length of 10mm. The oxide film was removed in an irregularly shaped area, using a 1.5mm diameter laser beam, while the oxide film was removed in a circle with 5μm diameter, using a 1.0mm diameter laser beam, due to an aberration of the convex lens. The diameter of the film-removed area decreased with decreasing laser power and laser irradiation time. Laser irradiation with a beam expander and a doublet lens caused the removal of the oxide film in a circle with 3μm diameter. Fine metal patterns with 4μm line width was fabricated on the epoxy resin board by successive steps of aluminum anodizing, laser irradiation, electroplating, resin attaching, and removal of the aluminum substrate and oxide film.

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© 2005 by The Surface Finishing Society of Japan
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