Development of New Magnetic Abrasives by Using Electroless Composite Coatings and Its Application to the Post CMP Technology

Abstract

The attention has been paid to the magnetic grinding method as a new technology that replaces the Chemical Mechanical Polishing (CMP), and this study was aimed to develop a novel magnetic abrasives. Conventionally used hard and heavy magnetic abrasives like iron produce a strong power in the process of magnetic grinding method and are therefore not suitable to be used for CMP that normally requires nano fabrication. Hence, a new magnetic abrasive has been made using electroless Ni-Co-diamond composite coatings on the light resin particle (specific gravity : 1.1). The newly-developed magnetic abrasive was practically applied in the process of magnetic grinding method, so that the copper layer of damascene sample was ground.