Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
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Micro Fabrication Technique Using Deep Dry Etching Process
Junji OHARA, Kazuhiko KANO, Yukihiro TAKEUCHI
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Keywords: Si, Etching, DRIE, MEMS, Microlens
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2008 Volume 59 Issue 2 Pages 98

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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