Small-Angle Scattering Measurements for Near-Surface Nanostructures

Journal of The Surface Finishing Society of Japan

Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869

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Small-Angle Scattering Measurements for Near-Surface Nanostructures

Hiroshi OKUDA

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Keywords: Grazing-Incidence Small-Angle X-ray Scattering(GISAXS), Small-Angle X-ray Scattering(SAXS), Nanostructured Thin Films

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2015 Volume 66 Issue 12 Pages 648-652

DOI https://doi.org/10.4139/sfj.66.648

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© 2015 by The Surface Finishing Society of Japan

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