Antireflection Using Nanohole Array for Efficient Silicon Solar Cells

Abstract

Antireflection of a silicon surface is an important means of increasing the photocurrent density and thereby improving solar cell conversion efficiency. We have produced thin nanohole arrays on silicon solar cells using metal-assisted-etching with electrolessly deposited silver nanoparticles. The nanohole array acts as an optical film, decreasing silicon surface reflectance, increasing photocurrent, and causing no damage to the pn-junction.