Low Temperature Thin Film Deposition Using Plasma Enhanced ALD

Journal of The Surface Finishing Society of Japan

Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869

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Low Temperature Thin Film Deposition Using Plasma Enhanced ALD

Takefumi YOSHIDA

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Keywords: Conformal Coating, Pin-Hole Free, Low Temperature Deposition

JOURNAL FREE ACCESS

2017 Volume 68 Issue 12 Pages 679-682

DOI https://doi.org/10.4139/sfj.68.679

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© 2017 by The Surface Finishing Society of Japan

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