Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Letters
Effect of Substrate Temperature on the Deposition of BN Films by means of Reactive Ion Plating
Honei CHIN, Shuichi WATANABE, Masashi KIKUCHI, Kazuyuki TOMIZAWA
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Keywords: Reactive Ion Plating, Boron Nitride Films, Substrate Temperature
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2017 Volume 68 Issue 12 Pages 733-734

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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