Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Reviews
Piezoelectric Thin-Film Actuators
Isaku KANNO
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Keywords: Piezoelectric Thin Film, Piezoelectric MEMS, Actuator
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2017 Volume 68 Issue 7 Pages 387-391

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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