Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
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Impact of Tungsten Content on the Surface Properties of TiN Films
Yudai KITAMIKAHayato SHINGUShuhei TANIGAWAHiroyuki HASEGAWA
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2018 Volume 69 Issue 3 Pages 123-125

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© 2018 by The Surface Finishing Society of Japan
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