2022 Volume 73 Issue 1 Pages 53-57
An electrostatic discharge（ESD）causes physical defects in electrical devices and lowers their production yields in the semiconductor industry. Although ESD problems inherent in device production cannot be eliminated entirely, various countermeasures against ESD can be undertaken. Many aluminum members with alumite treatment are used to build equipment and fixtures in semiconductor facilities. The ESD behaviors and tribological properties of an alumite and a DLC on the alumite were investigated. Results show that electrostatic is not charged on an alumite by a corona discharge test despite the high surface resistance. However, a slow charge and discharge behaviors were observed by coating a DLC on the alumites. Dielectric strength and hardness were enhanced. Friction coefficients against SUJ2 and alumina balls were reduced by less than a quarter by coating the DLC on the alumites. The promotion of DLC coating on an alumite in the semiconductor industry can present solutions to avoid and mitigate ESD damage and to improve tribological properties.
