Reviews of SFJ Technology Award 2021
Development of DLC Film Coating Technology to Achieve both High Performance and High Productivity Utilizing High-Density Plasma
Hiromichi NAKATA, Yoji SATO, Takayasu SATO, Kazutaka TACHIBANA, Osamu ARIYADA, Kenji KOSAKA
Author information
Keywords:
High-Density Plasma,
DLC,
High-Rate Deposition,
Microwave,
Plasma-Assisted Vapor Deposition
2022 Volume 73 Issue 3 Pages 128-129
Details
Article 1st page
