Abstract
Nebulous crystals formed in nickel films in early stage of deposition were studied by electron microscopy. The nickel film was roughly divided into two parts by the bright field image of electron microscope: one was a nebulous part containing a small amount of phosphorus, and the other was a black contrast part due to Bragg's reflection containing almost no phosphorus and with normal lattice constant of nickel. Even if the black contrasts were not observed under a certain Bragg condition, it was proved by varying the Bragg condition that there existed many fine crystals with normal lattice constant of nickel in the nebulous films. Most of the above fine crystals had (211) orientation, and other crystals of different orientations developed with the progress of time. These crystals of (211) orientation were positioned at angles of 120° each other on the plane of specimen. Many planar defects, which seemed to be microtwins or stacking faults, were observed in the crystals of (211) orientation.
