Journal of the Metal Finishing Society of Japan
Online ISSN : 1884-3395
Print ISSN : 0026-0614
ISSN-L : 0026-0614
Dry Etching
Sadayuki OKUDAIRAYasuharu SHIMOMOTOYoshifumi KAWAMOTO
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1979 Volume 30 Issue 10 Pages 508-517

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© The Surface Finishing Society of Japan
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