Abstract
The effect of heat treatment on the magnetic properties and structure of electroless Co-P plating films was investigated. The results obtained are as follows. 1) The four types of electroless cobalt solutions were employed as the plating baths. The deposition rate of these baths was affected by bath pH and phosphorus content in deposited films varied in the range of 0.8-4.3%. 2) The coercive force of deposited films varied wide range from 1000A/m (13Oe) to 70000A/m (880 Oe) at 0.10μm film thickness and these films were classified into three groups according to their coercive force. And these properties changed characteristically with heat treatment. 3) The structure of deposited films which varied widely from amorphous to crystal was changed remarkably by heat treatment. X-ray method revealed that Co2P precipitates at 773K-873K and TEM observation showed that the grain size of films changes with heat treatment. 4) It was revealed by this investigation that the magnetic properties of electroless Co-P plating films and their change with heat treatment are dominated mainly by grain size of films.
