Journal of the Metal Finishing Society of Japan
Online ISSN : 1884-3395
Print ISSN : 0026-0614
ISSN-L : 0026-0614
Formation of Tungsten Carbide Films from Tungsten Hexafluoride
Yong-bo CHONG, Nobuatsu WATANABE, Noriyuki TANAKA
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1985 Volume 36 Issue 8 Pages 340-343

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Abstract
Tungsten carbide films were prepared at 300-700°C from a WF6+H2+C6H6 reaction system. W3C films were obtained at 300°C, and W2C films at 450°C. Hardnesses were as high as 2500-3000HmV.
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