Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Chemical Vapor Deposition of Al2O3 Layer on Aluminum Anodic Oxide Films
Hideki MASUDAShu-hei NARITANobuyoshi BABA
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1989 Volume 40 Issue 12 Pages 1437-1438

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Abstract
Thermal decomposition of aluminum triisopropoxide resulted in chemical vapor deposition of a thin layer of alumina on the microporous structure of aluminum anodic oxide films. Properties of the deposition were analyzed with a scanning electron microscope and the mechanism of the deposition of the alumina film on the porous structure was discussed.
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