Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Synthesis of Ceramics Thin Films by Ion Beam Enhanced Deposition
Eiji KAMIJO
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Keywords: Dual Ion Beam Sputtering, Ion Beam Enhanced Deposition, Thin Films, Surface Modification
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1992 Volume 43 Issue 12 Pages 1119-1125

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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