ITO Films Prepared by Vacuum Deposition and RF Ion Plating

Journal of The Surface Finishing Society of Japan

Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869

ITO Films Prepared by Vacuum Deposition and RF Ion Plating

Shigeki DAIKUHARA

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Keywords: ITO Film, Vacuum Deposition, RF Ion Plating

JOURNAL FREE ACCESS

1992 Volume 43 Issue 2 Pages 82-86

DOI https://doi.org/10.4139/sfj.43.82

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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