Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Internal Stress of Thin Film by Ion Plated Method
Takashi ENDOH
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Keywords: Ion Plating, Thin Film, Internal Stress
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1992 Volume 43 Issue 7 Pages 630-634

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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