Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Amorphous Carbo-Nitride Film by Plasma CVD
Kiichiro KAMATA
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Keywords: Plasma CVD, Thin Film, Carbo-Nitride Film, DLC
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1994 Volume 45 Issue 12 Pages 1215-1219

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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