Abstract
Nickel sintered compacts with micro-throughpores which may be used as a filter element in the semiconductor production process were prepared. Mixed with the nickel powder of 3∼7μm grain size, acrylic particles of 0.4μm grain size and wax were compacted and the green compacts sintered in a mixture of argon and hydrogen gases at 973∼1373K. The effect of the amounts of acrylic particle and wax as binders and sintering temperature on the structure, pore size and pore density of the compact were examined. The optimal amount of acrylic added to nickel powder was fond to be 5∼7.5 parts per hundred plus a very small amount of wax. Nickel compacts sintered at 973∼1173K had a maximum pore size of 1∼3μm and an apparent pore ratio of 20∼45%. Characteristic curves of pressure drop versus air flow rate for several compacts measured at 298K were presented.
