Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Fine Grain Diamond Film Synthesis Using Pulse Microwave Plasma CVD
Yukihiro SAKAMOTO, Koji USHIKUBO, Matsufumi TAKAYA
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Keywords: Diamond, CVD, Pulse, Microwave, Nucleation Density, Fine Grain
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1996 Volume 47 Issue 6 Pages 548-549

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Journal of the Metal Finishing Society of Japan

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Jitsumu Hyomen Gijutsu

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