Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Deposition of Thin Films and Surface Modification of Semiconductors Using cat-CVD System
Akira IZUMI, Hideki MATSUMURA
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Keywords: cat-CVD, Hot-wire CVD, Amorphous-silicon, Poly-silicon, Silicon-nitride, Low Temperature Deposition, Low Temperature Nitridation
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1997 Volume 48 Issue 11 Pages 1082-1087

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Journal of the Metal Finishing Society of Japan

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Jitsumu Hyomen Gijutsu

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