Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Influence of Silicon Substrate Surface Condition on Gate Oxide Reliability
Yoshio OZAWA, Masato FUKUMOTO, Yasumasa SUIZU
Author information
Keywords: Silicon Oxide, Preoxide, Gate Oxide, Hot Carrier, Dielectric Breakdown
JOURNAL FREE ACCESS

1998 Volume 49 Issue 3 Pages 248-252

Details
Download PDF (567K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© The Surface Finishing Society of Japan
Previous article Next article
Favorites & Alerts

Recently viewed articles
Predecessor

Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

Share this page
feedback
 Top