Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Mechanical Properties of Hard Thin Films Studied by Nanoindentation
Hiroyuki SUGIMURAOsamu TAKAI
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2000 Volume 51 Issue 3 Pages 270-275

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