Carbon Ion Implantation and DLC Film Deposition for Titanium by Plasma Source Ion Implantation

Journal of The Surface Finishing Society of Japan

Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869

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Keywords: PSII, DLC, TiC

JOURNAL FREE ACCESS

2001 Volume 52 Issue 6 Pages 467-468

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