Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Application and Properties of Diamond-Like Carbon Coatings by Pulsed DC Plasma-Enhanced Chemical Vapor Deposition
Kazuki KAWATA
Author information
Keywords: DLC, PECVD, Pulsed DC, Tribology
JOURNAL FREE ACCESS

2002 Volume 53 Issue 11 Pages 732-733

Details
Article 1st page
Content from these authors
© The Surface Finishing Society of Japan
Previous article Next article
feedback
Top