1990 Volume 15 Issue 44 Pages 11-22
Apparatus placed in a clean room have great influence on the flowfield. Furthermore such flow obstacles often generate airborne particles into the airflow. Thus, it is very important to clarify the flowfield and contaminant diffusion field around flow obstacles. In this paper, the airflow distribution and the contaminant diffusion field in a conventional-flow-type clean room with flow obstacles in various arrangements are analyzed by means of model experiments and 3-D numerical simulations. The correspondences between the simulations and the experiments are fairly good both for the velocity field and for the contaminant diffusion field. On the basis of this validated procedure, further analyses of the airflow in a clean room with flow obstacles variously arranged are conducted by means of numerical simulations based on the k-ε turbulence model. From these analyses much useful information concerning the velocity field and the contaminant diffusion field around obstacles and concerning the influence of flow obstacles on the entire flow field is obtained.
