G-20 Experimental Study on Room Pressure Fluctuation at Cleanroom(Part 2) : Basic Experiments on Influence of Ductwork on Room Pressure Fluctuation

Abstract

The Room Pressure Control is one of the Important Demand Performances for Contamination Control in a Cleanroom. This Paper is Outline of Basic Experiments on Influence of Ductwork on Room Pressure Fluctuation, changing the bent duct type, section duct shape and filter, air velocity.